Evaluation of Standard Defects Using Surface Acoustic Waves...

Evaluation of Standard Defects Using Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes

Sato, Harumichi, Nakano, Shizuka, Ogiso, Hisato, Yamanaka, Kazushi
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.3267
Date:
May, 1997
File:
PDF, 375 KB
english, 1997
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