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Evaluation of Standard Defects Using Surface Acoustic Waves Generated by Phase Velocity Scanning of Laser Interference Fringes
Sato, Harumichi, Nakano, Shizuka, Ogiso, Hisato, Yamanaka, KazushiVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.3267
Date:
May, 1997
File:
PDF, 375 KB
english, 1997