Effect of Oxide Precipitate Size on Slip Generation in...

Japanese Journal of Applied Physics 1998 / 9 Vol. 37; Iss. Part 1, No

Effect of Oxide Precipitate Size on Slip Generation in Large Diameter Epitaxial Wafers

Akatsuka, Masanori, Sueoka, Koji, Katahama, Hisashi, Koie, Yasuo, Sadamitsu, Shinsuke
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Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.4663
Date:
September, 1998
File:
PDF, 1009 KB
1998
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