Simple Method for Resist Critical Dimension Prediction

Japanese Journal of Applied Physics 1998 / 12 Vol. 37; Iss. Part 1, No

Simple Method for Resist Critical Dimension Prediction

Nakao, Shuji, Mastubara, Hiroshi, Yamaguchi, Astumi, Sakai, Junjiroh, Nakae, Akihiro, Tatsu, Shin-ichirou, Tsujita, Kouichirou, Wakamiya, Wataru
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.6855
Date:
December, 1998
File:
PDF, 134 KB
english, 1998
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