Resonance Characteristics of Micro Cantilever in Liquid

Japanese Journal of Applied Physics 1998 / 12 Vol. 37; Iss. Part 1, No

Resonance Characteristics of Micro Cantilever in Liquid

Hirai, Yoshihiko, Mori, Ryosuke, Kikuta, Hisao, Kato, Nobuhiro, Inoue, Koji, Tanaka, Yoshio
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Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.7064
Date:
December, 1998
File:
PDF, 885 KB
1998
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