Design of Radial Line Slot Antennas at 8.3 GHz for Large...

Japanese Journal of Applied Physics 1999 / 4 Vol. 38; Iss. Part 1, No

Design of Radial Line Slot Antennas at 8.3 GHz for Large Area Uniform Plasma Generation

Yamamoto, Tetsuya, Chien, Nguyen Thang, Ando, Makoto, Goto, Naohisa, Hirayama, Masaki, Ohmi, Tadahiro
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.2082
Date:
April, 1999
File:
PDF, 488 KB
english, 1999
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