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Piezoelectric Linear Motor with Two Motional Functions of Small Displacement and Large Displacement
Maruko, Yuichi, Tomikawa, Yoshiro, Takano, TakehiroVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.7134
Date:
November, 2002
File:
PDF, 219 KB
english, 2002