Beam-induced Nanoscale Ripple Formation on Silicon with the...

Japanese Journal of Applied Physics 2007 / 9 Vol. 46; Iss. No. 35

Beam-induced Nanoscale Ripple Formation on Silicon with the Metal-Cluster-Complex Ion of Ir 4 (CO) 7+

Fujiwara, Yukio, Kondou, Kouji, Watanabe, Kouji, Nonaka, Hidehiko, Saito, Naoaki, Itoh, Hiroshi, Fujimoto, Toshiyuki, Kurokawa, Akira, Ichimura, Shingo, Tomita, Mitsuhiro
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L854
Date:
September, 2007
File:
PDF, 262 KB
english, 2007
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