Electrochemical Etching of Ru Film for Bevel Cleaning of...

Electrochemical Etching of Ru Film for Bevel Cleaning of Back End of Line

Aoki, Hidemitsu, Watanabe, Daisuke, Ooi, Naoki, Jong-Hyeon, Jeong, Kimura, Chiharu, Sugino, Takashi
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.04C019
Date:
April, 2009
File:
PDF, 131 KB
english, 2009
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