Absolute Densities of N 2 (...

Japanese Journal of Applied Physics 2010 / 2 Vol. 49; Iss. 2

Absolute Densities of N 2 ( A 3 Σ u+ ), N( 4S o ), and N( 2D o ) in an Inductively Coupled Nitrogen Plasma Source

Horikawa, Yoshimine, Kurihara, Kazuaki, Sasaki, Koichi
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.026101
Date:
February, 2010
File:
PDF, 475 KB
english, 2010
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