Advanced Organic Polymer for the Aggressive Scaling of...

Japanese Journal of Applied Physics 2011 / 4 Vol. 50; Iss. 4

Advanced Organic Polymer for the Aggressive Scaling of Low- k Materials

Pantouvaki, Marianna, Huffman, Craig, Zhao, Larry, Heylen, Nancy, Ono, Yukiharu, Nakajima, Michio, Nakatani, Koji, Beyer, Gerald P., Baklanov, Mikhail R.
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.04DB01
Date:
April, 2011
File:
PDF, 403 KB
english, 2011
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