Self-Aligned Formation of Nanoscale Phase Change Materials...

Japanese Journal of Applied Physics 2011 / 6 Vol. 50; Iss. 6

Self-Aligned Formation of Nanoscale Phase Change Materials for Nonvolatile Memory Application

Lee, Seung-Yun, Jung, Soun, Yoon, Sung-Min, Park, Young Sam
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Volume:
50
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.06GH03
Date:
June, 2011
File:
PDF, 650 KB
2011
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