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Investigation of Positive and Negative Bias Temperature Instability of High-κ Dielectric Metal Gate Metal–Oxide–Semiconductor-Field-Effect-Transistors by Random Telegraph Signal
Huang, Da-Cheng, Gong, Jeng, Huang, Chih-FangVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.036503
Date:
March, 2013
File:
PDF, 413 KB
english, 2013