Effects of coating material on the fabrication accuracy of...

Japanese Journal of Applied Physics 2015 / 09 Vol. 54; Iss. 9

Effects of coating material on the fabrication accuracy of focused ion beam machining of insulators

Joe, Hang-Eun, Park, Jae-Hyeong, Kim, Seong Hyeon, Kim, Gyuho, Jun, Martin B. G., Min, Byung-Kwon
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.096602
Date:
September, 2015
File:
PDF, 1.17 MB
english, 2015
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