The effect of thermal history during crystal growth on oxygen precipitation in Czochralski-grown silicon
Puzanov, N I, Eidenzon, A MVolume:
7
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/7/3/022
Date:
March, 1992
File:
PDF, 665 KB
english, 1992