![](/img/cover-not-exists.png)
Optical properties of planar immersion objectives in electron impact ion sources
Bullman, H G, Folkerts, R, Allison, WVolume:
7
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/7/4/011
Date:
April, 1996
File:
PDF, 180 KB
english, 1996