Optical properties of planar immersion objectives in...

Optical properties of planar immersion objectives in electron impact ion sources

Bullman, H G, Folkerts, R, Allison, W
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Volume:
7
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/7/4/011
Date:
April, 1996
File:
PDF, 180 KB
english, 1996
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