Structural properties of polycrystalline silicon films formed by pulsed rapid thermal processing
Yong-Qian, Wang, Xian-Bo, Liao, Shi-Bin, Diao Hong-Wei, Zhang, Yan-Yue, Xu, Wei-De, Chen Chang-Yong, Chen, Guang-Lin, KongVolume:
11
Language:
english
Journal:
Chinese Physics
DOI:
10.1088/1009-1963/11/5/315
Date:
May, 2002
File:
PDF, 257 KB
english, 2002