Simulation of an improved magnetic–electrostatic detector...

Simulation of an improved magnetic–electrostatic detector objective lens for LVSEM

G Knell, E Plies
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Volume:
427
Year:
1999
Language:
english
Pages:
5
DOI:
10.1016/s0168-9002(98)01548-4
File:
PDF, 185 KB
english, 1999
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