SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Barcelona, Spain (Monday 4 May 2015)] Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems - Finite element analysis of AlGaN/GaN micro-diaphragms with diamond coating

Sánchez-Rojas, José Luis, Brama, Riccardo, Dzuba, J., Vanko, G., Vojs, M., Rýger, I., Ižák, T., Jirásek, V., Kutiš, V., Lalinský, T.
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Volume:
9517
Year:
2015
Language:
english
DOI:
10.1117/12.2179126
File:
PDF, 408 KB
english, 2015
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