SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, Igor V., Asadchikov, Victor E., Bukreeva, Inna N., Duparre, Angela, Krivonosov, Yury S., Morawe, Christian, Ostashev, Vladimir I., Pyatakhin, Mikhail V., Ziegler, Eric, Al-Jumaily, GhanimVolume:
4099
Year:
2000
DOI:
10.1117/12.405809
File:
PDF, 434 KB
2000