SPIE Proceedings [SPIE International Symposium on Optical...

  • Main
  • SPIE Proceedings [SPIE International...

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - X-ray study of the roughness of surfaces and interfaces

Kozhevnikov, Igor V., Asadchikov, Victor E., Bukreeva, Inna N., Duparre, Angela, Krivonosov, Yury S., Morawe, Christian, Ostashev, Vladimir I., Pyatakhin, Mikhail V., Ziegler, Eric, Al-Jumaily, Ghanim
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
4099
Year:
2000
DOI:
10.1117/12.405809
File:
PDF, 434 KB
2000
Conversion to is in progress
Conversion to is failed