![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Ultrafast X-Ray Sources and Detectors - Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application
Demir, Pinar, Kacar, Elif, Akman, Erhan, Bilikmen, Sinan Kadri, Demir, Arif, Chang, Zenghu, Kyrala, George A., Kieffer, Jean-ClaudeVolume:
6703
Year:
2007
Language:
english
DOI:
10.1117/12.733149
File:
PDF, 265 KB
english, 2007