SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - In situ control of roughness of processed surfaces by reflectometric method
Filatov, Yuriy D., Filatov, Oleksandr Y., Heisel, Uwe, Storchak, Michael, Monteil, Guy, Gorecki, Christophe, Asundi, Anand K., Osten, WolfgangVolume:
7718
Year:
2010
Language:
english
DOI:
10.1117/12.854949
File:
PDF, 512 KB
english, 2010