Composition and Structure of Co-Sputtered Ta-Ti Alloy Thin...

Japanese Journal of Applied Physics 1972 / 1 Vol. 11; Iss. 1

Composition and Structure of Co-Sputtered Ta-Ti Alloy Thin Films

Oohashi, Takashi, Yamanaka, Shun'ichi
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Volume:
11
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.11.108
Date:
January, 1972
File:
PDF, 422 KB
english, 1972
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