Preferential In-Water Oxidation around Defects in Undoped LEC Semi-Insulating GaAs Wafers
Yasuami, Shigeru, Fukuta, Katsuyoshi, Nakanisi, TakatosiVolume:
24
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1327
Date:
October, 1985
File:
PDF, 386 KB
english, 1985