New High Current Low Energy Ion Source

Japanese Journal of Applied Physics 1986 / 3 Vol. 25; Iss. Part 2, No

New High Current Low Energy Ion Source

Hara, Tamio, Hamagaki, Manabu, Sanda, Atsuo, Aoyagi, Yoshinobu, Namba, Susumu
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Volume:
25
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.25.L252
Date:
March, 1986
File:
PDF, 361 KB
1986
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