Optical Absorption in Silicon Oxide Film Near the SiO...

Japanese Journal of Applied Physics 1990 / 12 Vol. 29; Iss. Part 2, No

Optical Absorption in Silicon Oxide Film Near the SiO 2 /Si Interface

Haga, Takashi, Miyata, Noriyuki, Moriki, Kazunori, Fujisawa, Masami, Kaneoka, Tatsunori, Hirayama, Makoto, Matsukawa, Takayuki, Hattori, Takeo
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L2398
Date:
December, 1990
File:
PDF, 426 KB
1990
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