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Synthesis of β-SiC Layer in Silicon by Carbon Ion `Hot' Implantation
Deguchi, Masahiro, Kitabatake, Makoto, Hirao, Takashi, Arai, Naoki, Izumi, TomioVolume:
31
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.343
Date:
February, 1992
File:
PDF, 293 KB
english, 1992