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Characteristics of SiO 2 as a High-Resolution Electron Beam Resist
Hiroshima, Hiroshi, Komuro, MasanoriVolume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.6153
Date:
December, 1993
File:
PDF, 568 KB
english, 1993