Low-Temperature Synthesis of C...

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 2, No

Low-Temperature Synthesis of C -Axis-Oriented Polycrystalline Aluminum Nitride Films by Electron Cyclotron Resonance Plasma Chemical Vapor Deposition Using AlBr 3 -N 2 -H 2 -Ar Gas System

Zhang, Wei, Someno, Yoshihiro, Sasaki, Makoto, Hirai, Toshio
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L116
Date:
January, 1993
File:
PDF, 180 KB
english, 1993
Conversion to is in progress
Conversion to is failed