Laser-Induced Dry Cleaning in Air -- A New Surface Cleaning Technology in Lieu of Carbon Fluorochloride (CFC) Solvents
Lu, Yong-Feng, Aoyagi, YoshinobuVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L430
Date:
March, 1994
File:
PDF, 212 KB
english, 1994