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Investigation of Surface Passivation Effect of $\bf a\mbox{-}SiN_{\ninmbi x}:H$ on a-Si:H by Photothermal Deflection Spectroscopy
Umezu, Ikurou, Daigo, Michio, Maeda, KeijiVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L873
Date:
June, 1994
File:
PDF, 234 KB
english, 1994