Reverse-Mode Single Ion Beam Induced Charge (R-mode SIBIC)...

Japanese Journal of Applied Physics 1994 / 7 Vol. 33; Iss. Part 2, No

Reverse-Mode Single Ion Beam Induced Charge (R-mode SIBIC) Imaging for the Test of Total Dose Effects in n-ch Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET)

Koh, Meishoku, Hara, Ken-ichi, Horita, Katsuyuki, Shigeta, Bungo, Matsukawa, Takashi, Kishida, Atsushi, Tanii, Takashi, Goto, Makoto, Ohdomari, Iwao
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L962
Date:
July, 1994
File:
PDF, 133 KB
english, 1994
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