Effect of Electron Beam Irradiation on Si Surface Cleaning...

Japanese Journal of Applied Physics 1995 / 5 Vol. 34; Iss. Part 2, No

Effect of Electron Beam Irradiation on Si Surface Cleaning in Ultrahigh-Vacuum System

Miura, Hiroshi, Ohtaka, Kouichi, Shindo, Daisuke
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.L573
Date:
May, 1995
File:
PDF, 238 KB
english, 1995
Conversion to is in progress
Conversion to is failed