Carbon Contamination Levels in Plasma-Enhanced Chemical Vapor Deposited Fluorinated Silica Glasses
Swope, Richard, Yoo, Woo SikVolume:
35
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.5843
Date:
November, 1996
File:
PDF, 454 KB
english, 1996