Pressure and Electrode Distance Effects on Ion Energy...

Japanese Journal of Applied Physics 1997 / 7 Vol. 36; Iss. Part 1, No

Pressure and Electrode Distance Effects on Ion Energy Distributions in RF Discharges

Zeuner, Michael, Neumann, Horst, Meichsner, Jürgen
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Volume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.4711
Date:
July, 1997
File:
PDF, 330 KB
english, 1997
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