A Capacitive Silicon Microaccelerometer with...

Japanese Journal of Applied Physics 1998 / 12 Vol. 37; Iss. Part 1, No

A Capacitive Silicon Microaccelerometer with Force-Balancing Electrodes

Ha, Byeoungju, Oh, Yongsoo, Song, Cimoo
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Volume:
37
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.7052
Date:
December, 1998
File:
PDF, 304 KB
english, 1998
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