Evaluation of Effective Image Blurring Factors in the...

Japanese Journal of Applied Physics 2000 / 12 Vol. 39; Iss. Part 1, No

Evaluation of Effective Image Blurring Factors in the Synchrotron Proximity X-Ray Lithography

Seo, Yongduck, Kim, Ohyun
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.6942
Date:
December, 2000
File:
PDF, 1.53 MB
english, 2000
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