Initial Oxidation of Si(001) Induced by the Translational...

Japanese Journal of Applied Physics 2000 / 12 Vol. 39; Iss. Part 1, No

Initial Oxidation of Si(001) Induced by the Translational Kinetic Energy of O 2 Supersonic Molecular Beams

Yoshigoe, Akitaka, Sano, Mutsumi, Teraoka, Yuden
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.7026
Date:
December, 2000
File:
PDF, 658 KB
english, 2000
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