Oxygenation Process of Ti-O Films Formed by Reactive Ion...

Japanese Journal of Applied Physics 2001 / 5 Vol. 40; Iss. Part 2, No

Oxygenation Process of Ti-O Films Formed by Reactive Ion Plating

Oumi, Kenichi, Kashiwagi, Kunihiro, Kokai, Hideki, Murayama, Youichi
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.L468
Date:
May, 2001
File:
PDF, 568 KB
english, 2001
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