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Removal of the Polymer Formed at Via Hole with Via Etching Stopped on an Al layer Structure
Song, Jongkook, Kim, Jong-Soo, Seo, Hyungtak, Kim, Yangdo, Jeon, HyeongtagVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.1216
Date:
March, 2003
File:
PDF, 586 KB
english, 2003