Structural Properties of Ultrathin Amorphous Silicon...

Japanese Journal of Applied Physics 2003 / 6 Vol. 42; Iss. Part 1, No

Structural Properties of Ultrathin Amorphous Silicon Oxynitride Layers

El-Oyoun, Hussein Mohamed Abu, Inokuma, Takao, Kurata, Yoshihiro, Hasegawa, Seiichi
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Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.3570
Date:
June, 2003
File:
PDF, 450 KB
english, 2003
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