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Magnetron-sputtered Hydrogenated Carbon Nitride: Structural and Optical Properties of As-deposited and Postannealed Films
Vinod, Purayath Robert, Nakamura-Itakura, Akiko, Kitajima, Masahiro, Terai, TakayukiVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.7057
Date:
November, 2003
File:
PDF, 333 KB
english, 2003