Polymer Treatment by Plasma Immersion Ion Implantation of...

Japanese Journal of Applied Physics 2004 / 9 Vol. 43; Iss. 9A

Polymer Treatment by Plasma Immersion Ion Implantation of Nitrogen for Formation of Diamond-Like Carbon Film

Tan, Ing Hwie, Ueda, Mario, Kostov, Konstantin, Nascente, Pedro Augusto P., Demarquette, Nicole Raymonde
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.6399
Date:
September, 2004
File:
PDF, 188 KB
english, 2004
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