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Electrodeposition of Organic Dielectric Film and Its Application to Vibrational Microelectromechanical System Devices
Sakata, Tomomi, Ishii, Hiromu, Sato, Norio, Shimamura, Toshishige, Kuwabara, Kei, Kudou, Kazuhisa, Machida, KatsuyukiVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5646
Date:
June, 2006
File:
PDF, 125 KB
english, 2006