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Angle-Dependent Measurement of Near Edge X-ray Absorption Fine Structure of Annealing Effect on Local Structure of Focused-Ion-Beam Chemical Vapor Deposition Diamond-Like Carbon
Saikubo, Akihiko, Kanda, Kazuhiro, Kato, Yuri, Igaki, Jun-ya, Kometani, Reo, Matsui, ShinjiVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.7512
Date:
November, 2007
File:
PDF, 667 KB
english, 2007