Elementary Analysis of Diamond-Like Carbon Film Formed by...

Japanese Journal of Applied Physics 2007 / 12 Vol. 46; Iss. 12

Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition

Igaki, Jun-ya, Saikubo, Akihiko, Kometani, Reo, Kanda, Kazuhiro, Suzuki, Tsuneo, Niihara, Koichi, Matsui, Shinji
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.8003
Date:
December, 2007
File:
PDF, 169 KB
english, 2007
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