Theoretical Study on Relationship between Acid Generation...

Japanese Journal of Applied Physics 2007 / 11 Vol. 46; Iss. No. 47

Theoretical Study on Relationship between Acid Generation Efficiency and Acid Generator Concentration in Chemically Amplified Extreme Ultraviolet Resists

Kozawa, Takahiro, Tagawa, Seiichi, Shell, Melissa
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L1143
Date:
November, 2007
File:
PDF, 105 KB
english, 2007
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