Behavior of Transition into Inductively Coupled Plasma Mode...

Japanese Journal of Applied Physics 2008 / 3 Vol. 47; Iss. 3

Behavior of Transition into Inductively Coupled Plasma Mode with Internal Radio Frequency Multiturn Antenna

Nakagaki, Keita, Yamauchi, Toshihiko, Kanno, Yoshinori, Kobayashi, Seiji, Takemoto, Ryou
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.1745
Date:
March, 2008
File:
PDF, 604 KB
english, 2008
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