![](/img/cover-not-exists.png)
Measurement of Reaction Current during Atomic Force Microscope Local Oxidation of Conductive Surfaces Capped with Insulating Layers
Shimada, Yasuyuki, Yamada, Tsutomu, Shirakashi, Jun-ichi, Takemura, YasushiVolume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.768
Date:
January, 2008
File:
PDF, 244 KB
english, 2008