Characteristics of Silicon Dioxide Film Deposited by...

Characteristics of Silicon Dioxide Film Deposited by Neutral Beam-Assisted Chemical Vapor Deposition

Im, Young, Lee, Jung Hee, Lee, Youn-Seoung, Lee, Won-Jun, Rha, Sa-Kyun
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.8905
Date:
December, 2008
File:
PDF, 266 KB
english, 2008
Conversion to is in progress
Conversion to is failed