Heterodyne Linear Polarization Modulation Ellipsometer
Yu, Chih-Jen, Lin, Chu-En, Su, Li-Chen, Chou, ChienVolume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.032403
Date:
March, 2009
File:
PDF, 142 KB
english, 2009